Magnetron Sputtering Production Line (DRAFT OFFER)

                                                                                     Technical Specification





1. Application  


2.            Process description          

   2.1                  Basic design data  

   2.2                  Process sequence 

   2.3                  Technical data        

   2.4       System utilities


3. Design and configuration of the system         

   3.1                   Mechanical parts   

   3.2                   Power supply system

   3.3                   Process control      


4. Documentation      


5. Acceptance test     


6. Assembly and commissioning of the system at buyer's site           


7. Acceptance test at buyer's site 


8. Warranty     


9. Equipment and services not supplied by the seller         


10.              Equipment list


10.1.1      Host machine

10.1.2      Electric control system

10.1.3      Water treatment system

10.1.4      Know how and technical transfer

10.1.5      Spare parts

10.1.6      Options

1.        Application

The continuous horizontal on-line sputtering system model WGC-1650/3 is designed for coating glass sheets with metallic and compound layers for the production of reflective glass.


2.        Process Description

2.1     Basic design parameters

2.1.1 Layer specifications

Layer type:

Metallic: Titanium, Chrome, Stainless Steel, Tin, Aluminum, Copper, etc.

Compound: TiN, TiO2, etc.

Layer thickness: 5-100nm

Transmission: 8-40% at 380-780 nm wavelengths

Deposition temperature: room temperature

2.1.2 Substrate dimensions:

Substrate material: float glass sheets

Available substrate area: 2100×1650mm ( L×W)

Thickness of substrate: 5 to 10 mm

2.1.3 Capacity:

Substrates per loading :  1 piece ( 2100 mm ×1650 mm)

Cycle time/sheet:        240 sec.

Calculate with 6000 working hours, 90 percent uptime, 95 percent of pass, the annual capacity is estimate 270,000 SQM.

2.1.4 Deposition uniformity:

Across a sheet

±3% or less within 2100×1650 mm on each side of the substrate.

Batch to Batch

±3% or less within 2100×1650 mm at continuous operation.


2.2 Process sequence:

Step 1: Loading glass sheet (float flat glass sheet/substrate)

Step 2: Glass sheet is fed into the washing unit and moved to entry station

Step 3: The entry lock chamber and gate valve 1 open; glass sheet moves into entry lock chamber; then chamber ( and gate valve 1 ) is closed; then pumped down to 1 Pa

Step 4: Glass sheet moves into the entry buffer chamber through gate valve 2

Step 5: The entry hold chamber and the gate valve 3 open, glass sheet moves into, and then the gate valve 3 is closed.

Step 6: Glass sheet moves into the sputtering chambers for coating.

In process of coating Ti, SS and Cr etc, materials can be coated onto the surface of glass sheet under specified conditions

Step 7: The exit holds chamber and the gate valve 4 open, glass sheet moves into, and then the gate valve 4 is closed.

Step 8: Glass sheet moves to exit buffer chamber after a series of testing for transmittance (T%) and reflectance (R%)

Step 9: Glass sheet then moved out from exit buffer chamber into exit lock chamber following the opening of gate valve 5

Step 10: Released to atmosphere pressure, glass sheet then moved out of exit lock chamber into exit station.

Step 11: Entering into on-line inspection room for final on line T% & R% testing

Step 12: Glass unloading


2.3      Technical Data


Ultimate pressure after 8 hr pump-down: 

Entry lock chamber & vacuum lock chamber: 5×10-1 Pa or below

Buffer Chamber 1    : 3×10-3 Pa or below

Sputtering Chamber:          2×10-3 Pa or below

Buffer Chamber 2    : 3×10-3 Pa or below

Exit lock chamber & vacuum lock chamber: 5×10-1 Pa or below


2.4      System utilities


Electric power:

-3 phases, 380 V +5%/-10% 50Hz, five wires (3 Ac, N, PE)

Cooling water specification

-Pressure:  2 to 3 bar    

-Water out-let: 0.5 bar below

-Cooling water inlet temperature range: less than 25

-Hardness of water:  0.04mg/l (equivalent)

-Electric conductivity: 1000μS/cm

-PH-value: 7.5-8

Compressed air

-Inlet pressure: 5 to 7 bar

-Dew point under pressure max. + 2.5

-Free of oil and dust


For the venting of chambers

-Inlet pressure: max: 1 bar

-Purity:  99.9%

Sputtering gas

-Sputter gas: Argon, Oxygen, Nitrogen

-Purity of sputter gas ≥99.99%

-Inlet pressure: max.2 bar absolute

Ambient requirements

-For temperature at machine and control room: 20 to 25

-Relative humidity: 70-80%


3.  Design and configuration of the system

l    Roller disk transportation system on which glass sheet is moved flexible.

l    Double side pumping system for uniform gas pressure

l    Special pumping modules for uniform gas-flow distribution over the target area

l    For making some kind of films, the glass sheet maybe moves to and fro the sputtering chambers.

l    Modular design configuration for future expansion

l    Chambers with reinforcement ribs


3.1 Mechanical system introduction

3.1.1 Loading station

-Steel frame and fixture, sizes 2450 mm×2100 mm

-Disk type roller transport system for linear movement of substrate

3.1.2 On-line high quality washing station

-Four sets of row brush

-Three complete of column brush

-Three sets of cold air knife

-One set of hot air knife

3.1.3 Entry lock Chamber and vacuum-lock

-Supporting Frame and Vacuum Chamber

-One substrate lock valves (opening: 40 mm×1720 mm)

-Flanges for installation of the pump system, measuring equipment and gas inlet

-Vacuum Measuring Equipment: ZDR-1 105 to 10-1 Pa thermal Priani vacuum gauge

-One sight window

-Roughing Pump Station

   Roots pump:   ZJP-2200                      1 set

   Piston pump:   H-150                          1 set

   Rotary pump:   2X-70                          1 set

3.1.4 Entry Buffer Chamber

-Steel vacuum chamber

-One substrate lock valves (opening: 40mm×1720mm)

-Pumping System

  Diffusing pump:   K-400                        2 sets

  Piston pump:      H-150                        1 set

-Vacuum Measuring Equipment: ZDF-3 105 to 10-1Pa thermal Pirani and 10 to 10-6 Pa ion vacuum gauge.

-One sight window

3.1.5 Entry hold chamber

-Steel vacuum chamber

-One substrate lock valves (opening: 40mm×2350mm)

-Flanges for installation of the pump system, measuring equipment

-Vacuum Measuring Equipment-One sight window

-Pump system

   Diffusion pump:   K-400                       4 sets

3.1.6 Sputtering chamber

-Steel vacuum chamber

 There are one sputtering chamber installed with three cathodes. So if you making multi-layer films, the different cathode could not working in the mean time. You have to run them alternatively.

-Pumping System:

  Piston pump:     H-150       1 sets

-Vacuum Measuring Equipment: ZDK-1 10 to 10-6 Pa ion vacuum gauge

-Process gas supply system

  Mass Flow Controller:  F07A   2 sets

-One sight window

3.1.7 Exit hold chamber

-Steel vacuum chamber

-One substrate lock valves (opening: 40mm×2350mm)

-Flanges for installation of the pump system, measuring equipment

-Vacuum Measuring Equipment-One sight window

-Pump system

   Diffusion pump:   K-400             4 sets

3.1.8 Exit Buffer Chamber

-Steel vacuum chamber

-Pumping System:

 Diffusing pump:   K-400               2 sets

 Piston pump:      H-150                1 set

-Vacuum Measuring EquipmentZDF-3  105 to 10-1Pa thermal Pirani and 10 to 10-6 Pa ion vacuum gauge

- One sight window


3.1.9 Entry lock Chamber and vacuum-lock

-Supporting Frame and Vacuum Chamber

-One substrate lock valves (opening: 40mm×2350mm)

-Flanges for installation of the pump system, measuring equipment and gas inlet

-Vacuum Measuring Equipment: ZDR-1 105 to 10-1 Pa thermal Priani vacuum gauge

-One sight window

-Roughing Pump Station

   Roots pump:   ZJP-2200                      1 set

   Piston pump:   H-150                          1 set

   Rotary pump:   2X-70                          1 set

3.2.0 On-line inspection room

-Room size: 3m x 4m x 2.2 m

-Fluorescent tubes: 21 pcs

3.2.1 Unloading station 

-Steel frame and fixture, sizes 2500mm x3600mm

-Disk type roller transport system for linear movement of substrate


3.2 Power Supply System

3.2.1 Voltage Requirement

-System operational voltage 3 x 380v, 50 Hz, 5-wire system including loadable neutral and separate ground.

-Power requirement varies from 800KVA to 1000KVA depending on the size of system and amount of installed components

3.2.2 Power control cabinets

There are two main control cabinets, each of which has a main knife switch 600A

-Sputtering power control: 250A × 6

-Control system: 100A × 1

-Pumping system:  250A × 3

-Transport system:  200A × 1

-Washing Unit:  250A×1


3.3        System and process control


WGC-1650/3 and its process are controlled by a series of individual subassembly controllers. Subassembly control, sequential control and system diagnostics are conducted by the system's central computer unit IPC610.  Digital I/Os are controlled by the Mitsubishi's A2AS series programmable controller (PLC) which are slaved to the IPC610.


The WGC-1650/3 incorporates the advanced system and process control available in the industry.


3.3.1 PC System Control

-The center computer use PC system, based on an Intel Pentium microprocessor, being integrated as a sub-system in the control cabinet.

-Windows 95, Windows 98 or Windows NT OS system, GUI operation, easy to use

-Sequence control of different systems

-Parameter setting, modify, store and recall

-Up to 15 to 20 sets of parameter can be saved and recalled according to different process

-Data transfer and communication with the Programmable Logic Controller

-Two 20" SVGA color monitors

-Process parameter changes can be entered through an keyboard or a mouse. 

-Data transfer and communication with the system's Programmable Logic Controller

-Data storage capability on a External Memory Media


a.           Driving system.

The status of each driving unit will be shown on the screen. The speed of the production line is controlled by Mitsubishi's frequency convertor which is linked to IPC 601.

b.           Vacuum pumping system

  The status of each pumping unit, gate valve, vacuum valve, etc, will  be monitor by the computer and display on screen.

c.            Gas flow system

A mass proportion flow controller is applied.

d.           Alarm system

e.           Power supply system

Total power supply, washing machine power, cathode power supply, etc.

f.            Other functions

Historical record, Tending analysis, Report printing, etc


3.3.2 Programmable Logic Controller

-Programmable logic controller (PLC) is built on a Mitsubishi system, Model: A2AS which controls and processes all the digital and analog I/Os of WGC-1650/3.


3.3.3 Auxiliary Control Devices

There are additional individual controllers distributed about the system. These controllers operate independently but are triggered and administered by the system's control. Most of the data is displayed at the system's central monitor. The setting of the parameters can also be conducted/performed from the central monitor/keyboard. Some examples of those individual controllers are:

Mass flow controllers

Transport speed control

Power supplies for sputtering sources, etc.


3.3.4 Software

The operation of the system does not require any programming language. The dialog is in simple English and the parameter entry is menu driven by using a Microsoft windows environment. The standard software includes:

-The standard software package, CITECT, is for the system control and the basic process sequence such as:

Pump control and automatic valve sequencing

Parameters value display via the CRT

Logical sequence for glass sheet transport through the system

Process interlocks through basic parameters

Graphical display of selected process parameters, trend and print out of actual values of process parameters required

Diagnostics and preventive maintenance routines:

Self diagnostic of the system and the interlocks on the board level.


3.3.5 Menu

The menu for the operation of the system and the data recalling is displayed on the color monitor. Always displayed are the status of the system's utilities and the status of the sputtering sources  (ON / OFF). More information will be displayed for the individual modules or different features by selecting one of the following sub-menus:

-Vacuum system

-Drive and gas supply system

-Parameter Entry

-Alarm List

-Set Time & Date

-Recipe Handling

-Process Constants

-Input & Output Listing


4. Documentation

A.           The documents in English containing:

B.           Mechanical assembly drawings and corresponding parts list.

C.           Pneumatic diagram

D.           Water piping / fluid diagram

E.           Electric circuit diagram (also diagram/documentation of "standard parts")

F.           Wiring diagram

G.           Processor program

H.           Computer instruction manual

I.            List of recommend spare and wear parts (mechanical. and electrical. )

J.            Parts list with numbers

K.           Operation manual

L.            Maintenance manual

Other engineering documents available on request for interested customers


5. Acceptance Test

Testing at factory includes:

5.1         Test of Operation

-Checking of the equipment by means of the order acknowledgement.

-Checking of the functions of the individual subassemblies such as:

-Transport system

-Pumps and valves (pumping time)

-Power supplies

-Vacuum chamber

-Safety interlocks (water, electric current, pressure, faulty operation)

-Function and working of the equipment in manual operation and automatic operation.

-Two hours automatic continuous operation under conditions which are similar to the production process. For this test, target material, glass and substrate filtering will be supplied by the buyer.

-Deposition uniformity

- ±3% layer thickness uniformity across a sheet and from batch to batch within the usable substrate area as per substrate dimensions.

-Measurement method: off-line Spectrophotometer.

5.2 Specification of targets to be supplied by the buyer.

 Specification of Titanium, Chrome and Stainless Steel targets to be defined.

5.3     Vacuum test

Based on clean, dry and empty vacuum chambers. Ultimate pressure (after 8 h pump-down, after venting with dry N2 ) as per 2.3 Technical Data.


6. Assembly and commissioning of the system at buyer's site

6.1     For erection at site the following specialists will be delegated:

-2 Mechanical engineers

-2 Electronic engineer.

-2 Process engineer

Duration : 4weeks for each engineer


7. Acceptance test at buyer's site

For final acceptance the same program, as described under item 5.1. to 5.3 will be performed.

The continuous test will be performed with a running time or 8 hours.


8. Warranty

In supplement of our General Conditions of Sale in item 10, the period of warranty of the delivered equipment will be 12 months after date of putting into operation at buyer's site, but not longer than 18 months after date of delivery, especially readiness for shipment.


9.        Equipment and services not supplied by the seller

If not stated otherwise the following equipment and service are not included in the delivery according to this specification:

-All buildings on Buyer's site

-Foundations, pits, cable ducts on Buyer's site. Electricity supply up to the main switch on Buyer's site

-The connection and supply lines to the connecting points of the system for cooling water, compressed air, process gases and the exhaust pipes.

-The preparatory work for the erection of the system on Buyer's site, including discharge and transportation of the systems on Buyer's site.

- Assembly cranes and tools on Buyer's site.

- Substrates holders, substrate, consumables, targets and process gases required for the start-up and functional acceptance test of the systems at Seller's works and for the start-up and final acceptance test of systems on Buyer's site.

These services will be provided by the Buyer free of charge in due time.



Equipment List


Description                                       Quantity             Remarks

1. Host machine

1.1 Lock chamber                              2              

1.1.1 Chambers                                 2               16Mn Steel

1.1.2 Gate valve                                2

1.1.3 Pumping system Rotating pump 2X-70                2               70 l/s Roots pump ZJP-2200               2               2200l/s Piston pump H-150                   2               150 l/s

1.2 Buffer chamber                            2

1.2.1 Chambers                                 2

1.2.2 Gate valve                                2

1.2.3 Pumping system Oil diffusion pump K-400           4 Piston pump H-150                   2

1.3 Hold chamber                               2

1.3.1 Chambers                                 2

1.3.2 Gate valve                                2

1.3.3 Pumping system Oil diffusion pump K-400           8

1.4 Sputtering Chamber                      1

1.4.1 Chambers                                 1

1.4.2 Pumping system                 Piston pump H-150                   1

1.5 Transmission system                     1

1.6 Auxiliary platform

1.6.1 Loading platform                        1

1.6.2 Clean room                               1

1.6.3 Buffer platform                         1

1.6.4 Unloading platform                     1

1.6.5 Online inspection room                1

1.7 Sputtering system

1.7.1 Cathode                                    3

1.7.2 Process gas distributor                3

1.7.3 Online reflectivity detector           4

1.8 Pre-wash station                           1

1.8.1 Row brush                                4

1.8.2 Column brush                            3

1.8.3 Cold air knife                             3

1.8.4 Hot air knife                              1

1.9 Post-wash station                          1

1.9.1 Column brush                            1

1.9.2 Cold air knife                             1

2.0 Gas supply system                        1


2. Electric control system

2.1 Main control cabinet                        5        

2.2 Sputtering power supply cabinet       3        

2.3 Transmission control cabinet            1        

2.4 Pumping system cabinet                  3        

2.5 Electric control cabinet of washer      1        

2.6 Main power distribution cabinet         2        



3. Know-how and technical transfer


4. Spare parts for one year


5.                                                                    Options

5.1 Water treatment system

The system is consist of some of the following device according to the customer's water quality

Mechanical Filter                                          

Precise Filter                                               

Positive Ion Exchanger                                  

De-CO2 Tower                                              

Negative Ion Exchanger                                

Mixed Ion Exchanger                                    

Acid Measuring Box                                      

Alkali Measuring Box                                     

Clean Water Pump                                       

De-Salt Pump                                              

Acid-Alkali Pump                                          

Acid-Alkali Flowmeter                                    


Recycle Water Pump                                     

Heat Exchanger                                           

Cooling Tower                                             

5.2 Multi point color inspector

5.3 Offline spectrophotometer     1 set            

5.4 Lapping machine                  1 set            

5.5 Vacuum leaking detector        1 set            

5.6 Semi-automatic                    2 sets          

loading/unloading machine                             

5.7 Air compressor                    1 set            

5.8 Target

5.8.1 Stainless steel                   1 set            

5.8.2 Titanium                           1 set            

5.8.3 Tin                                  1 set            

5.8.4 Chrome                           1 set            

5.8.5 Aluminum                         1 set